Air Bearing Voice Coil Linear Stage A-142PIglide
Achieves high-speed and smooth sub-micron operation with 5nm resolution at 200mm/s.
The A-142 is a compact linear stage driven by a voice coil motor, achieving speeds of up to 200 mm/s and accelerations of 10 m/s² within a travel range of 10 mm. It offers a sensor resolution of 5 nm, a position accuracy of ±0.2 µm, and a minimum incremental motion of 50 nm. With a zero-wear air bearing structure, it requires no lubrication and is suitable for cleanroom applications, making it ideal for semiconductor inspection, optical adjustment, and measurement applications.
- Company：PI Japan
- Price：Other
